NanoLyzer – Portable Instrument that measures UPW quality for :
- Final filters and ultrafilters
- UPW unit processes (mixed beds, prefilters, etc.)
- UPW system components (piping, valves, etc.)
- Point-of-use filters
- Wet wafer manufacturing tools
NanoLyzer – produces 0.1 gpm of sub-10 nm purified water for:
- Final wafer rinse or spray rinse
- Immersion Lithography
- Portable Unit
