NanoLyzer

Manufactured by Microfier, Inc.

NanoLyzer increases semiconductor yields by identifying the sources of ultrapure water contamination.

NanoLyzer is an analytical instrument that measures and identifies the elemental composition of particles in ultrapure water.

NanoLyzer monitors, alerts, and identifies changes in water quality for wet wafer processing tools, filtration, and ultrapure water treatment systems.

NanoLyzer is the only known metrology that provides EDS elemental composition of sub-50 nanometer particles:

Agglomerated 12 nanometer silica particles identified in ultrapure water.

Spectral Analysis of Particles